Atomic layer deposition of ZnO: A review

Semiconductor Science and Technology

Volumn 29, Issue 4, 2014, Pages

  Tynell, Tommi ^a   Karppinen, Maarit ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

atomic layer deposition; thin film; ZnO

Indexed keywords

DEPOSITION; LIGHT EMITTING DIODES; METALLIC FILMS; MICROELECTRONICS; OPTICAL FILMS; THIN FILMS; ZINC OXIDE;

FUNDAMENTAL PROPERTIES; MICROELECTRONICS INDUSTRY; POTENTIAL MATERIALS; STRINGENT REQUIREMENT; THIN-FILM TRANSISTOR (TFTS); ZNO; ZNO THIN FILM;

ATOMIC LAYER DEPOSITION;

EID: 84897013898     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/29/4/043001     Document Type: Review

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