Conformal coating on ultrahigh-aspect-ratio nanopores of anodic alumina by atomic layer deposition

Chemistry of Materials

Volumn 15, Issue 18, 2003, Pages 3507-3517

  Elam, J W ^a   Routkevitch, D ^c   Mardilovich, P P ^c,d   George, S M ^a,b  

^a UNIVERSITY OF COLORADO   (United States)

^b UCB 450   (United States)

^c Nanomaterials Research LLC   (United States)

^d HEWLETT PACKARD COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ASPECT RATIO; COMPUTER SIMULATION; DEPOSITION; MICROANALYSIS; MONTE CARLO METHODS; SCANNING ELECTRON MICROSCOPY;

ATOMIC LAYER DEPOSITION;

ANODES;

ALUMINUM OXIDE; SILICON DIOXIDE; ZINC; ZINC OXIDE;

ACCURACY; ADHESION; ARTICLE; ATOMIC LAYER DEPOSITION; CHEMICAL ANALYSIS; CONCENTRATION (PARAMETERS); DIFFUSION COEFFICIENT; ELECTROCHEMICAL ANALYSIS; ELECTRON PROBE MICROANALYSIS; FILM; FOURIER TRANSFORMATION; HALF LIFE TIME; MATERIAL COATING; MEASUREMENT; MEMBRANE COMPONENT; MEMBRANE STRUCTURE; MONTE CARLO METHOD; POROSITY; PREDICTION; REACTION ANALYSIS; REPRODUCIBILITY; SCANNING ELECTRON MICROSCOPY; TECHNIQUE; THICKNESS;

EID: 0141567439     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm0303080     Document Type: Article

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