Effects of annealing temperature of buffer layer on structural and optical properties of ZnO thin film grown by atomic layer deposition

Solid State Communications

Volumn 148, Issue 9-10, 2008, Pages 395-398

  Kim, C R ^a   Lee, J Y ^a   Shin, C M ^a   Leem, J Y ^a   Ryu, H ^a   Chang, J H ^b   Lee, H C ^b   Son, C S ^c   Lee, W J ^d   Jung, W G ^e   Tan, S T ^f   Zhao, J L ^g   Sun, X W ^f,g  

^a Inje University   (South Korea)

^b Korea Maritime University   (South Korea)

^c Silla University   (South Korea)

^d Dong Eui University   (South Korea)

^e Kookmin University   (South Korea)

^f INSTITUTE OF MICROELECTRONICS   (Singapore)

^g NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

A. ZnO; B. Annealing; B. Atomic layer deposition

Indexed keywords

ANNEALING; ATOMIC PHYSICS; ATOMS; BUFFER LAYERS; CRYSTAL ATOMIC STRUCTURE; METALLIC FILMS; OPTICAL FILMS; OPTICAL PROPERTIES; OPTICAL WAVEGUIDES; PHYSICAL VAPOR DEPOSITION; PULSED LASER DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTING ZINC COMPOUNDS; SILICON; SOLIDS; THICK FILMS; THIN FILM DEVICES; THIN FILMS; ZINC ALLOYS; ZINC OXIDE;

(002) PEAKS; A. ZNO; ANNEALING TEMPERATURES; ATOMIC LAYER DEPOSITION (ALD; ATOMIC LAYERS; B. ANNEALING; B. ATOMIC LAYER DEPOSITION; EDGE EMISSIONS; HIGH QUALITIES; RING OPERATORS; SI SUBSTRATES; SMOOTHER SURFACES; XRD MEASUREMENTS; ZNO BUFFER LAYERS; ZNO THIN FILMS;

ATOMIC LAYER DEPOSITION;

EID: 54249111777     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssc.2008.09.034     Document Type: Article

References (12)

1. Water W., and Chu S. Mater. Lett. 55 (2002) 67
2. Mitra P., and Maiti H.S. Sens. Actuators B 97 (2004) 49
3. Sun X.W., Zhao J.L., Tan S.T., Tan L.H., Tung C.H., Lo G.Q., Kwong D.L., Zhang Y.W., Li X.M., and Teo K.L. Appl. Phys. Lett. 92 (2008) 111113
4. Zhu B.L., Sun X.H., Zhao X.Z., Su F.H., Li G.H., Wu X.G., Wu J., Wu R., and Liu J. Vacuum 82 (2008) 495
5. Ko H.J., Chen Y.F., Ko J.M., Hanada T., Zhu Z., Fukuda T., and Yao T. J. Cryst. Growth 207 (1999) 87
6. Hong R., Huang J., He H., Fan Z., and Shao J. Appl. Surf. Sci. 242 (2005) 346
7. Tan S.T., Chen B.J., Sun X.W., Fan W.J., Kwok H.S., Zhang X.H., and Chua S.J. J. Appl. Phys. 98 (2005) 013505
8. Lim J., and Lee C. Thin Solid Fims 515 (2007) 3335
9. Tan S.T., Sun X.W., Zhang X.H., Chua S.J., Chen B.J., and Teo C.C. J. Appl. Phys. 100 (2006) 033502
10. Lee S., Im Y.H., Kim S.H., and Hahn Y.B. Superlattices Microstruct. 39 (2006) 24
11. Nakamura T., Yamada Y., Kusumori T., Minoura H., and Muto H. Thin Solid Films 411 (2002) 60
12. Djurisic A.B., and Leung Y.H. Small 2 (2006) 944