Spectroscopic characterization of highly doped zno films grown by atomic-layer deposition for three-dimensional infrared metamaterials [Invited]

Optical Materials Express

Volumn 1, Issue 5, 2011, Pages 883-889

  Frölich, Andreas ^a   Wegener, Martin ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONFORMAL COATINGS; DIRECT LASER WRITING; DOPED ZNO; DOPING CONCENTRATION; FREE ELECTRON MODELS; OPTICAL SPECTRA; PLASMA FREQUENCIES; POLYMER TEMPLATES; SPECTROSCOPIC CHARACTERIZATION; ZNO; TRANSFORMATION OPTICS;

METAMATERIALS; PLASMA WAVES; THREE DIMENSIONAL; ZINC OXIDE; ATOMIC LAYER DEPOSITION; II-VI SEMICONDUCTORS; OXIDE MINERALS;

SEMICONDUCTOR DOPING;

EID: 84857550084     PISSN: None     EISSN: 21593930     Source Type: Journal    
DOI: 10.1364/OME.1.000883     Document Type: Article

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