Atomic layer deposition of zinc oxide films: Effects of nanocrystalline characteristics on tribological performance

Surface and Coatings Technology

Volumn 207, Issue , 2012, Pages 361-366

  Chai, Zhimin ^a   Lu, Xinchun ^a   He, Dannong ^b  

^a TSINGHUA UNIVERSITY   (China)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Atomic layer deposition; Nanocrystal; Tribology; Zinc oxide

Indexed keywords

AMBIENT AIR; BALL-ON-DISK; DIETHYLZINC; DRY SLIDING FRICTION; FRICTION COEFFICIENTS; LOW FRICTION COEFFICIENTS; NANOCRYSTALLINES; SELECTED AREA DIFFRACTION; SI SUBSTRATES; SOLID LUBRICANT FILM; SUBSTRATE TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY TEM; TRIBOLOGICAL PERFORMANCE; UNIFORM SIZE; WEAR LIFE; ZINC OXIDE (ZNO); ZNO FILMS;

FRICTION; METALLIC FILMS; MICROSTRUCTURE; NANOCRYSTALS; OXIDE FILMS; SCANNING PROBE MICROSCOPY; SOLID LUBRICANTS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; X RAY DIFFRACTION; ZINC OXIDE;

ATOMIC LAYER DEPOSITION;

EID: 84865768000     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.07.021     Document Type: Article

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