ZnO modified high aspect ratio carbon electrodes for hydrogen sensing applications

Procedia Engineering

Volumn 25, Issue , 2011, Pages 1669-1672

  Singh, Umesh ^a   Lee, Hyun Ae ^b   Byun, Young Chul ^b   Kumar, Amit ^a   Seal, Sudipta ^a   Kim, Hyoungsub ^b   Cho, Hyoung J ^a,b  

^a University of Central Florida   (United States)

^b Sungkyunkwan University   (South Korea)

Author keywords

Atomic layer deposition; Carbon; Gas sensors; Hydrogen; MEMS; ZnO

Indexed keywords

CARBON ELECTRODE; CARBON POSTS; CHEMICAL SENSING DEVICES; FABRICATED SENSORS; HIGH ASPECT RATIO; HIGH DENSITY; HYDROGEN GAS SENSORS; HYDROGEN-SENSING; LOW TEMPERATURES; MAXIMUM SENSITIVITY; METAL OXIDE SEMICONDUCTOR; PHOTORESIST PATTERNS; RESISTANCE DROP; SURFACE-MODIFIED; TESTING RESULTS; ZNO;

ASPECT RATIO; ATOMIC LAYER DEPOSITION; CARBON; CHEMICAL SENSORS; ELECTRODES; GAS DETECTORS; MEMS; MOS DEVICES; PHOTORESISTS; SURFACE TESTING; ZINC OXIDE;

HYDROGEN;

EID: 84863142069     PISSN: 18777058     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2011.12.413     Document Type: Conference Paper

References (6)

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