SCOPUS 정보 검색 플랫폼

Volumn 515, Issue 7-8, 2007, Pages 3335-3338

Effects of substrate temperature on the microstructure and photoluminescence properties of ZnO thin films prepared by atomic layer deposition

Author keywords

Atomic layer deposition; Microstructure; Photoluminescence; X ray diffraction; Zinc oxide

Indexed keywords

DEPOSITION; FILM GROWTH; MICROSTRUCTURE; PHOTOLUMINESCENCE; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

ATOMIC LAYER DEPOSITION (ALD)]; CRYSTAL QUALITY; SEMICONDUCTOR FILMS;

THIN FILMS;

EID: 33846939341 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2006.09.007 Document Type: Article

Times cited : (132)

References (15)

1
- 0030243118
- Reynolds D.C., Look D.C., and Jogai B. Solid State Commun. 99 (1996) 873
- (1996) Solid State Commun. , vol.99 , pp. 873
- Reynolds, D.C.¹ Look, D.C.² Jogai, B.³

2
- 0001184799
- Narayan J., Dovidenko K., Sharma A.K., and Oktyabrsky S. J. Appl. Phys. 84 (1998) 2597
- (1998) J. Appl. Phys. , vol.84 , pp. 2597
- Narayan, J.¹ Dovidenko, K.² Sharma, A.K.³ Oktyabrsky, S.⁴

3
- 0031364609
- Sang B., Yamada A., and Kongai M. Sol. Energy Mater. Sol. Cells 49 (1977) 19
- (1977) Sol. Energy Mater. Sol. Cells , vol.49 , pp. 19
- Sang, B.¹ Yamada, A.² Kongai, M.³

4
- 0031359105
- Saito K., Watanabe Y., Takahashi K., Matsuzawa T., Sang B., and Kongai M. Sol. Energy Mater. Sol. Cells 49 (1977) 187
- (1977) Sol. Energy Mater. Sol. Cells , vol.49 , pp. 187
- Saito, K.¹ Watanabe, Y.² Takahashi, K.³ Matsuzawa, T.⁴ Sang, B.⁵ Kongai, M.⁶

5
- 1542316237
- Lim J., Shin K., Kim H.W., and Lee C. Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. 107 (2004) 301
- (2004) Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. , vol.107 , pp. 301
- Lim, J.¹ Shin, K.² Kim, H.W.³ Lee, C.⁴

6
- 13444251185
- Lim J., Shin K., Kim H.W., and Lee C. Thin Solid Films 475 (2005) 256
- (2005) Thin Solid Films , vol.475 , pp. 256
- Lim, J.¹ Shin, K.² Kim, H.W.³ Lee, C.⁴

7
- 0031546852
- Yamada A., Sang B., and Konagai M. Appl. Surf. Sci. 112 (1997) 216
- (1997) Appl. Surf. Sci. , vol.112 , pp. 216
- Yamada, A.¹ Sang, B.² Konagai, M.³

8
- 0033886407
- Yousfi E.B., Fouache J., and Lincot D. Appl. Surf. Sci. 153 (2000) 223
- (2000) Appl. Surf. Sci. , vol.153 , pp. 223
- Yousfi, E.B.¹ Fouache, J.² Lincot, D.³

9
- 0028761966
- Lujala V., Skarp J., Tammenmaa M., and Suntola T. Appl. Surf. Sci. 82/83 (1994) 34
- (1994) Appl. Surf. Sci. , vol.82-83 , pp. 34
- Lujala, V.¹ Skarp, J.² Tammenmaa, M.³ Suntola, T.⁴

10
- 0345148449
- Ott A.W., and Chang R.P.H. Mater. Chem. Phys. 58 (1999) 132
- (1999) Mater. Chem. Phys. , vol.58 , pp. 132
- Ott, A.W.¹ Chang, R.P.H.²

11
- 0035967555
- Yousfi E.B., Weinberger B., Donsanti F., Cowache P., and Lincot D. Thin Solid Films 387 (2001) 29
- (2001) Thin Solid Films , vol.387 , pp. 29
- Yousfi, E.B.¹ Weinberger, B.² Donsanti, F.³ Cowache, P.⁴ Lincot, D.⁵

12
- 0034326157
- Studenikin S.A., Cocivera M., Kellner W., and Pascher H. J. Lumin. 91 (2000) 223
- (2000) J. Lumin. , vol.91 , pp. 223
- Studenikin, S.A.¹ Cocivera, M.² Kellner, W.³ Pascher, H.⁴

13
- 0037202584
- Wang Q.P., Zhang D.H., Xue Z.Y., and Hao X.T. Appl. Surf. Sci. 201 (2002) 123
- (2002) Appl. Surf. Sci. , vol.201 , pp. 123
- Wang, Q.P.¹ Zhang, D.H.² Xue, Z.Y.³ Hao, X.T.⁴

14
- 0036419991
- Nakata Y., Okada T., and Maeda M. Appl. Surf. Sci. 197-198 (2002) 368
- (2002) Appl. Surf. Sci. , vol.197-198 , pp. 368
- Nakata, Y.¹ Okada, T.² Maeda, M.³

15
- 0037163241
- Xu X., Guo C., Qi Z., Liu H., Xu J., Shi C., Chong C., Huang W., Zhou Y., and Xu C. Chem. Phys. Lett. 364 (2002) 57
- (2002) Chem. Phys. Lett. , vol.364 , pp. 57
- Xu, X.¹ Guo, C.² Qi, Z.³ Liu, H.⁴ Xu, J.⁵ Shi, C.⁶ Chong, C.⁷ Huang, W.⁸ Zhou, Y.⁹ Xu, C.¹⁰

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.