Fabrication of ZnO nanowires using nanoscale spacer lithography for gas sensors

Small

Volumn 4, Issue 8, 2008, Pages 1105-1109

  Ra, Hyun Wook ^a   Choi, Kwang Sung ^a   Kim, Jin Hwan ^a   Hahn, Yoon Bong ^a   Im, Yeon Ho ^a  

^a Chonbuk National University   (South Korea)

Author keywords

Nanowires; Semiconductors; Sensors; Spacer lithography; Zinc oxide

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC WIRE; ELECTRON MOBILITY; GAS DETECTORS; GAS SENSING ELECTRODES; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOWIRES; OPTICAL DESIGN; SEMICONDUCTING ZINC COMPOUNDS; THICK FILMS; ZINC OXIDE;

CONDUCTION BANDS; ELECTRICAL CHARACTERIZATIONS; ETCH DEPTH; GAS SENSING; GAS SENSORS; HIGH RESISTANCE; NANO SCALING; NANOWIRE DEVICES; SACRIFICIAL OXIDE; SEMICONDUCTORS; SENSORS; SPACER LITHOGRAPHY; ZNO NANOWIRE; ZNO NANOWIRES; ZNO THIN FILMS;

ZINC ALLOYS;

NANOWIRE; ZINC OXIDE;

ARTICLE; CHEMISTRY; COMPARATIVE STUDY; GAS; PRINTING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; SYNTHESIS; ULTRASTRUCTURE; X RAY DIFFRACTION;

GASES; MICROSCOPY, ELECTRON, SCANNING; NANOWIRES; PRINTING; SEMICONDUCTORS; X-RAY DIFFRACTION; ZINC OXIDE;

EID: 49749134775     PISSN: 16136810     EISSN: 16136829     Source Type: Journal    
DOI: 10.1002/smll.200700922     Document Type: Article

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