Controlling of preferential growth mode of ZnO thin films grown by atomic layer deposition

Journal of Crystal Growth

Volumn 310, Issue 2, 2008, Pages 284-289

  Wojcik A ^a   Godlewski, M ^a   Guziewicz, E ^a   Minikayev, R ^a   Paszkowicz, W ^a  

^a INSTITUTE OF PHYSICS   (Poland)

Author keywords

A1. Crystal structure; A1. Low temperature growth; A3. Atomic layer deposition; B1. Zinc acetate; B2. Zinc oxide

Indexed keywords

ATOMIC LAYER DEPOSITION; CRYSTAL STRUCTURE; FILM GROWTH; GROWTH TEMPERATURE; LOW TEMPERATURE OPERATIONS; ZINC OXIDE;

LOW TEMPERATURE GROWTH; SEPARATION TIME; ZINC ACETATE;

THIN FILMS;

EID: 37349054689     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.10.010     Document Type: Article

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