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Volumn 509, Issue 18, 2011, Pages 5623-5626
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Influence of growth temperature on the optical and structural properties of ultrathin ZnO films
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Author keywords
Atomic layer deposition; Photoluminescence; Ultrathin films; ZnO
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Indexed keywords
FILM SURFACES;
SI SUBSTRATES;
TEM;
ULTRA-THIN;
ULTRAVIOLET EMISSION;
ZNO;
ZNO FILMS;
ATOMIC FORCE MICROSCOPY;
ATOMIC LAYER DEPOSITION;
GROWTH TEMPERATURE;
METALLIC FILMS;
PHOTOLUMINESCENCE;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION;
ZINC OXIDE;
ULTRATHIN FILMS;
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EID: 79953273221
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jallcom.2011.02.093 Document Type: Article |
Times cited : (27)
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References (23)
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