Study of atomic layer epitaxy of zinc oxide by in-situ quartz crystal microgravimetry

Applied Surface Science

Volumn 153, Issue 4, 2000, Pages 223-234

  Yousfi, El Bekkaye ^a   Fouache, Jacques ^a   Lincot, Daniel ^a  

^a PSL RESEARCH UNIVERSITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; EPITAXIAL GROWTH; GRAVIMETRIC ANALYSIS; MONOLAYERS; QUARTZ APPLICATIONS; SUBSTRATES; SURFACE PHENOMENA; SURFACE ROUGHNESS; THERMAL EFFECTS; THIN FILMS;

ATOMIC LAYER EPITAXY (ALE); QUARTZ CRYSTAL MICROBALANCE; SURFACE RECONSTRUCTION;

ZINC OXIDE;

EID: 0033886407     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00330-X     Document Type: Article

References (15)

1. Suntola T. Hurle D.T.J. Handbook of Crystal Growth, Part B. 3:1994;Elsevier.
2. Niinistö L., Ritala M., Leskelä M. Mater. Sci. Eng. B. 41:1996;23.
3. Lakomaa E.L. Appl. Surf. Sci. 75:1994;185.
4. Suntola T. Appl. Surf. Sci. 100/101:1996;391.
5. Luo Y., Slater D., Han M., Moryl J., Osgood R.M. Jr., Chen J.G. Langmuir. 14:1998;1493.
6. Lujala V., Skarp J., Tammenmaa M., Suntola T., Wallinga J. 12th European Photovoltaïc Solar Energy Conf. 1994;1511.
7. Aarik J., Aidla A., Jaek A., Leskelä M., Niinistö L. J. Mater. Chem. 4:1994;1239.
8. Aarik J., Aidla A., Kukli K. Appl. Surf. Sci. 75:1994;180.
9. Tammenmaa M., Koskinen T., Hiltunen L., Niinisto L., Leskelä M. Thin Solid Films. 124:1985;125.
10. Yamada A., Sang B., Konagai M. Appl. Surf. Sci. 112:1997;216.
11. Sang B., Yamada A., Konagai M. Jpn. J. Appl. Phys. 37:1998;L1125.
12. Mason W.P. Piezoelectric Crystals and Their Application to Ultrasonics. 1950;Van Nostrand, New York. Chap. 6.
13. Ylilammi M. Thin Solid Films. 279:1996;124.
14. Asikainen T., Ritala M., Leskäla M., Prohaska T., Friedbacher G., Grasserbauer M. Appl. Surf. Sci. 99:1996;91.
15. Bosco E., Rangarajan S.K. J. Electroanal. Chem. 134:1982;213.