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Thin Solid Films

Volumn 414, Issue 1, 2002, Pages 43-55

ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: Growth and surface roughness measurements

(3) Elam, J W a Sechrist, Z A a George, S M a,b

a UNIVERSITY OF COLORADO (United States)

b UCB 450 (United States)

Author keywords

Aluminum oxide; Atomic layer deposition; Superlattices; Zinc oxide

Indexed keywords

ALUMINA; ATOMIC FORCE MICROSCOPY; CRYSTAL GROWTH; DEPOSITION; LAMINATED COMPOSITES; NUCLEATION; PROFILOMETRY; SUPERLATTICES; SURFACE ROUGHNESS; THIN FILMS; ZINC OXIDE;

NANOLAMINATES;

NANOSTRUCTURED MATERIALS;

EID: 0036647871 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)00427-3 Document Type: Article

Times cited : (248)

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