Conformal ZnO coatings on high surface area silica gel using atomic layer deposition

Thin Solid Films

Volumn 516, Issue 18, 2008, Pages 6158-6166

  Libera, J A ^a   Elam, J W ^a   Pellin, M J ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Atomic layer deposition; Catalysis; Silica gel; ZnO

Indexed keywords

ATOMIC LAYER DEPOSITION; SILICA GEL; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

DEZ PRECURSORS; HIGH SURFACE AREA; ZNO COATINGS;

COATINGS;

EID: 44649149556     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.11.044     Document Type: Article

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