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Volumn 22, Issue 25, 2012, Pages 12824-12829
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Atomic layer deposition of germanium-doped zinc oxide films with tuneable ultraviolet emission
b
SAFC
(United Kingdom)
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Author keywords
[No Author keywords available]
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Indexed keywords
ALLOY FORMATION;
CYCLIC PULSE;
DEPOSITION TEMPERATURES;
DIETHYLZINC;
GERMANIUM DOPING;
HIGH RESOLUTION;
NEAR BAND EDGE;
OXIDE MATRIX;
SUBSTRATE TEMPERATURE;
TEMPERATURE RANGE;
TRANSMISSION ELECTRON MICROGRAPH;
ULTRAVIOLET EMISSION;
WATER VAPOUR;
ATOMIC LAYER DEPOSITION;
OXIDE FILMS;
SEMICONDUCTOR DOPING;
X RAY DIFFRACTION;
ZINC OXIDE;
GERMANIUM;
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EID: 84862188346
PISSN: 09599428
EISSN: 13645501
Source Type: Journal
DOI: 10.1039/c2jm31391j Document Type: Article |
Times cited : (34)
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References (21)
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