Fabrication of ZnO nanopillars by atomic layer deposition

Materials Transactions

Volumn 51, Issue 2, 2010, Pages 253-255

  Wu, Mong Kai ^a   Chen, Miin Jang ^a   Tsai, Feng Yu ^a   Yang, Jer Ren ^a   Shiojiri, Makoto ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Atomic layer deposition; Ultraviolet emission; ZnO nanopillars

Indexed keywords

ALD GROWTH; AVERAGE DIAMETER; HIGH CRYSTALLINITY; HIGH QUALITY; HIGH TEMPERATURE; NANOPILLARS; ROOM TEMPERATURE; SAPPHIRE SUBSTRATES; ULTRAVIOLET EMISSION; ULTRAVIOLET LUMINESCENCE; ZNO;

ATOMIC LAYER DEPOSITION; ATOMS; SAPPHIRE;

ZINC OXIDE;

EID: 77949722095     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.MC200905     Document Type: Article

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