Atomic layer deposition of zinc oxide on multiwalled carbon nanotubes for UV photodetector applications

Journal of the Electrochemical Society

Volumn 158, Issue 2, 2011, Pages

  Lin, Yu Hung ^a   Lee, Po Sheng ^a   Hsueh, Yang Chih ^a   Pan, Ko Ying ^a   Kei, Chi Chung ^b   Chan, Ming Hui ^b   Wu, Jyh Ming ^c   Perng, Tsong Pyng ^a   Shih, Han C ^a,d  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

^c FENG CHIA UNIVERSITY   (Taiwan)

^d CHINESE CULTURE UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH UNIFORMITY; NOVEL PROCESS; REACTION CYCLES; SURFACE COVERAGES; UV PHOTODETECTORS; ZNO;

ATOMIC LAYER DEPOSITION; NANOCOMPOSITES; OPTOELECTRONIC DEVICES; PHOTODETECTORS; ZINC OXIDE;

MULTIWALLED CARBON NANOTUBES (MWCN);

EID: 78650720811     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3522764     Document Type: Article

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