Nucleation and growth modes of ALD ZnO

Crystal Growth and Design

Volumn 12, Issue 11, 2012, Pages 5615-5620

  Baji, Zsófia ^a   Lábadi, Zoltán ^a   Horváth, Zsolt E ^a   Molnár, György ^a   Volk, János ^a   Bársony, István ^a,b   Barna, Péter ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b UNIVERSITY OF PANNONIA   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ALD GROWTH; DEPOSITION TEMPERATURES; DIFFERENT SUBSTRATES; GROWTH MODES; INITIAL PHASIS; LAYER-BY-LAYERS; NUCLEATION AND GROWTH; POLYCRYSTALLINE FILM; ULTRA-THIN; ZNO;

GALLIUM NITRIDE; SAPPHIRE; ULTRATHIN FILMS; ZINC OXIDE;

ATOMIC LAYER DEPOSITION;

EID: 84868709159     PISSN: 15287483     EISSN: 15287505     Source Type: Journal    
DOI: 10.1021/cg301129v     Document Type: Article

References (33)

1. George, S. M. Chem. Rev. 2010, 110, 111
2. Ritala, M.; Leskela, M. Nanotechnology 1999, 10, 19
3. Kim, H.; Lee, H. B. R.; Maeng, W. J. Thin Solid Films 2009, 517, 2563
4. Ritala, M.; Leskela, M. Thin Solid Films 2002, 409, 138
5. Suntola, T.; Hyvarinen, J. Annu. Rev. Mater. Sci. 1985, 15, 177
6. Ylilammi, M. Thin Solid Films 1996, 279, 124
7. Ritala, M.; Leskela, M. Handbook of Thin Film Materials; Nalwa, H. S., Ed.; Academic Press: San Diego, CA, 2002.
8. Puurunen, R. J. Appl. Phys. 2005, 97, 121301
9. Ihanus, J.; Ritala, M.; Leskela, M.; Prohaska, T.; Resch, R.; Friedbacher, G. T.; Grasserbauer, M. Appl. Surf. Sci. 1997, 120, 43
10. Jagadish, C.; Pearton, S., Eds. Zinc Oxide Bulk, Thin Films and Nanostructures: Processing, Properties and Applications; Elsevier: Amsterdam, 2006.
11. Özgür, Ü Alivov, Y. I.; Liu, C.; Teke, A.; Reshchikov, M. A.; Dogan, S.; Avrutin, V.; Cho, S. J.; Morkoc, H. J. Appl. Phys. 2005, 98, 041301
12. Elam, J. W.; George, S. M. Chem. Mater. 2003, 15, 1020
13. Ahn, C. H.; Kim, H; Cho, H. K. Thin Solid Films 2010, 519, 747
14. Kirby, S. D.; van Dover, R. B. Thin Solid Films 2009, 517, 1958-1960
15. Lu, J. G.; Ye, Z. Z.; Zeng, Y. J.; Zhu, L. P.; Wang, L.; Yuan, J.; Zhao, B. H.; Liang, Q. L. J. Appl. Phys. 2006, 100, 0737140
16. Yamada, A.; Sang, B.; onagai, K. M. Appl. Surf. Sci. 1997, 112, 216
17. Lim, J.; Lee, C. Thin Solid Films 2007, 515, 3335
18. Lim, S. J.; Kwon, S.; Kim, H. Thin Solid Films 2008, 516, 1523
19. Luka, G.; Krajewski, T.; Wachnicki, L.; Witkowski, B.; Lusakowska, W.; Paszkowicz, W.; Guziewicz, E.; Godlewski, M. Phys. Status Solidi A 2010, 207, 1568
20. Baji, Zs.; Lábadi, Z.; Horváth, Z. E.; Bársony, I. Thin Solid Films 2012, 520, 4703
21. Yamada, A.; Sang, B.; Konagai, M. Appl. Surf. Sci. 1997, 112, 216
22. Kim, S. K.; Hwang, C. S.; Park, S.-H. K.; Yun, S. J. Thin Solid Films 2005, 478, 103
23. Chen, H. C.; Chen, M. J.; Liu, T. C.; Yang, J. R.; Shiojiri, M. Thin Solid Films 2010, 519, 536
24. Wachnicki, L.; Krajewski, T.; Luka, G.; Witkowski, B.; Kowalski, B.; Kopalko, K.; Domagala, J. Z.; Guziewicz, M.; Godlewski, M.; Guziewicz, E. Thin Solid Films 2010, 518, 4556
25. Lim, J.; Shin, K.; Kim, H. W.; Lee, C. Mater. Sci. Eng., B 2004, 107, 301
26. Lin, C.-W.; Ke, D.-J.; Chao, Y.-C.; Chang, L.; Liang, M.-H.; Ho, Y.-T. J. Cryst. Growth 2007, 298, 472-476
27. Hyung, G. W.; Park, J.; Koo, J. R.; Choi, K. M.; Kwond, S. J.; Cho, E. S.; Kim, Y. S.; Kim, Y. K. Solid-State Electron. 2012, 69, 27
28. King, D. M.; Liang, X.; Li, P.; Weimer, A. W. Thin Solid Films 2008, 516, 8517-8523
29. Lima, Y. T.; Son, J. Y.; Rhee, J.-S. Ceramics International. http://dx.doi.org/10.1016/j.ceramint.2012.06.035.
30. Haukka, S.; Roots, A. J. Phys. Chem. 1994, 98, 6
31. Wang, X.; Tabakman, S. M.; Dai, H. J. Am. Chem. Soc. 2008, 130, 8152
32. Alles, H.; Aarik, J.; Kozlova, J.; Niilisk, A.; Rammula, R.; Sammelselg, V. In Graphene: Synthesis, Characterization, Properties and Applications; Gong, J. R., Ed.; InTech: Manhattan, NY, 2011.
33. Baji, Zs.; Laábadi, Z.; Horváth, Z. E.; Fried, M.; Szentpáli, B.; Bársony, I. J. Therm. Anal. Calorim. DOI: 10.1007/s10973-011-1641-3.