Ethanol sensors based on ZnO nanotubes with controllable wall thickness via atomic layer deposition, an O 2 plasma process and an annealing process

Sensors and Actuators, B: Chemical

Volumn 162, Issue 1, 2012, Pages 300-306

  Cho, Sungkwon ^a   Kim, Dai Hong ^a   Lee, Byoung Sun ^a   Jung, Joohyun ^a   Yu, Woong Ryeol ^a   Hong, Seong Hyeon ^a   Lee, Seonghoon ^a  

^a Seoul National University   (South Korea)

Author keywords

Atomic layer deposition; Electrospinning; Nanotube; O 2 plasma; Sensing device; ZnO

Indexed keywords

AIR ATMOSPHERE; ANNEALING PROCESS; CHEMICAL SPECIES; ELECTRICAL RESISTANCES; ETHANOL SENSORS; ETHANOL VAPOR; GAS RESPONSE; HIGH RESPONSE; ORGANIC TEMPLATES; PLASMA PROCESS; SENSING DEVICES; THERMAL ANNEALING PROCESS; WALL STRUCTURE; WALL THICKNESS; ZNO; ZNO NANOTUBE;

ADSORPTION; ATOMIC LAYER DEPOSITION; ELECTROSPINNING; ETHANOL; PLASMAS; SENSORS; ZINC OXIDE;

NANOTUBES;

EID: 84862809547     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.12.081     Document Type: Article

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