Fabrication of atomic layer deposited zinc oxide thin film transistors with organic gate insulator on flexible substrate

Molecular Crystals and Liquid Crystals

Volumn 529, Issue , 2010, Pages 131-136

  Choi, Kyung Min ^a   Hyung, Gun Woo ^b   Yang, Jin Woo ^b   Koo, Ja Ryong ^b   Kim, Young Kwan ^b   Kwon, Sang Jik ^a   Cho, Eou Sik ^a  

^a Gachon University   (South Korea)

^b Hong Ik University   (South Korea)

Author keywords

Atomic layer deposition; c poly vinyl alcohol; oxide tft; PET substrate; zinc oxide

Indexed keywords

ACTIVE LAYER; ATOMIC FORCE MICROSCOPES; ATOMIC LAYER DEPOSITED; ELECTRICAL CHARACTERISTIC; FLEXIBLE SUBSTRATE; GATE INSULATOR; GATE-INSULATING LAYERS; LOW TEMPERATURES; OFF CURRENT; ORGANIC GATE INSULATOR; PET SUBSTRATE; TRANSPARENT CONDUCTIVE OXIDE THIN FILM; ZNO; ZNO LAYERS;

ATOMIC LAYER DEPOSITION; ATOMS; ETHYLENE; FABRICATION; FIELD EFFECT TRANSISTORS; SUBSTRATES; THIN FILM TRANSISTORS; THIN FILMS; ZINC;

ZINC OXIDE;

EID: 78649488583     PISSN: 15421406     EISSN: 15635287     Source Type: Journal    
DOI: 10.1080/15421406.2010.495889     Document Type: Conference Paper

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