Large-scale nano piezo force position arrays as ultrahigh-resolution micro- and nanoparticle tracker

Advanced Functional Materials

Volumn 23, Issue 2, 2013, Pages 191-197

  Subannajui, Kittitat ^a,b   Menzel, Andreas ^a   Güder, Firat ^a   Yang, Yang ^a   Schumann, Katrin ^c   Lu, Xiaoli ^d   Zacharias, Margit ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b Mahidol University   (Thailand)

^c KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^d XIDIAN UNIVERSITY   (China)

Author keywords

force sensors; nanodevices; particle trackers; phase shift lithography; spacer lithography

Indexed keywords

ADVANCED LITHOGRAPHY; DETECTION MECHANISM; DEVICE FABRICATIONS; FORCE SENSOR; HIGH RESOLUTION; LARGE ARRAYS; LITHOGRAPHIC PROCESS; NANO SCALE; NANO-DEVICES; NANO-METER-SCALE; NANOLINES; NANOMETER RESOLUTIONS; PIEZOELECTRIC SIGNALS; PLANAR SUBSTRATE; SI WAFER; SPACER LITHOGRAPHY; WAFER SCALE; ZNO;

NANOPARTICLES; PHASE SHIFT; PHASE SHIFTERS; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; SENSORS; SIGNAL GENERATORS; SILICON; SILICON WAFERS; ZINC OXIDE;

LITHOGRAPHY;

EID: 84872057942     PISSN: 1616301X     EISSN: 16163028     Source Type: Journal    
DOI: 10.1002/adfm.201201201     Document Type: Article

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