Effects of surface pretreatment on growth of ZnO on glass substrate

Physica Status Solidi (A) Applications and Materials Science

Volumn 205, Issue 8, 2008, Pages 1971-1974

  Makino, Hisao ^a   Kishimoto, Seiichi ^a   Yamada, Takahiro ^a   Miyake, Aki ^a   Yamamoto, Naoki ^a   Yamamoto, Tetsuya ^a  

^a KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION (ALD; C -AXIS; CRYSTALLINE SIZES; GLASS SUBSTRATES; HEXAMETHYLDISILAZANE; INCUBATION PERIODS; INPLANE; POLYCRYSTALLINE; PREFERENTIAL ORIENTATIONS; PRETREATMENTS; RANDOM ORIENTATIONS; SUBSTRATE SURFACES; SURFACE PRETREATMENT; ZNO THIN FILMS;

ATOMIC LAYER DEPOSITION; CRYSTALLINE MATERIALS; FILM GROWTH; GLASS; MAGNETIC FILMS; MOLECULAR BEAM EPITAXY; PHYSICAL VAPOR DEPOSITION; PULSED LASER DEPOSITION; SEMICONDUCTING ZINC COMPOUNDS; SUBSTRATES; THICK FILMS; THIN FILMS; ZINC ALLOYS; ZINC OXIDE;

SURFACE MORPHOLOGY;

EID: 54249149926     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200778912     Document Type: Conference Paper

References (12)

1. Ü. Özgür, Ya. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Doǧan, V. Avrutin, S. J. Cho, and H. Morkoç, J. Appl. Phys. 98, 041301 (2005).
2. T. Suntola, in: Handbook of Crystal Growth, Vol. 3, edited by D. T. J. Hurle (Elsevier, 1994), Chap. 14, p. 601.
3. V. Lujala, J. Skarp, M. Tammenmaa, and T. Suntola, Appl. Surf. Sci. 82/83, 34-40 (1994).
4. A. Yamada, B. Sang, and M. Konagai, Appl. Surf. Sci. 112, 216(1997).
5. E. B. Yousfi, J. Fouache, and D. Lincot, Appl. Surf. Sci. 153, 223-234 (2000).
6. S. H. Ko Park and Y. E. Lee, J. Mater. Sci. 29, 2195-2197 (2004).
7. Y. Kajikawa, J. Cryst. Growth 289, 387-394 (2006).
8. J. Lim, K. Shin, H. Kim, and C. Lee, Thin Solid Films 475, 256-261 (2005).
9. A. Kytökivi and S. Haukka, J. Phys. Chem. B 101, 10365-10372 (1997).
10. G. K. Williamson and W. H. Hall, Acta Metall, l, 22 (1953).
11. M. Yan, Y. Koide, J. R. Babcock, P. R. Markworth, J. A. Belot, T. J. Marks, and R. P. H. Chang, Appl. Phys. Lett. 79, 1709 (2001).
12. X. Jiang, R. Chen, and S. F. Bent, Surf. Coat. Technol. 201, 22 (2007).