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Journal of the Electrochemical Society

Volumn 158, Issue 6, 2011, Pages

Characteristics of Zr-doped ZnO thin films grown by atomic layer deposition

(4) Lin, Ming Chih a Chang, Yao Jen a Chen, Miin Jang a Chu, Cheng Jye b

a NATIONAL TAIWAN UNIVERSITY (Taiwan)

b Nanmat Technology Co Ltd (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECT-RELATED BANDS; DOPED ZNO; ELECTRICAL AND OPTICAL PROPERTIES; HIGH TRANSPARENCY; LOW RESISTIVITY; LOW THRESHOLDS; NEAR BAND EDGE EMISSIONS; PHOTOLUMINESCENCE SPECTRUM; ROOM TEMPERATURE; SAPPHIRE SUBSTRATES; TRANSPARENT CONDUCTIVE OXIDES; ULTRAVIOLET LIGHT-EMITTING; VISIBLE SPECTRA; ZIRCONIUM-DOPED ZINC OXIDES; ZNO;

ATOMIC LAYER DEPOSITION; CARRIER CONCENTRATION; CONDUCTIVE FILMS; DEPOSITION; ELECTRIC PROPERTIES; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; THIN FILMS; ULTRAVIOLET RADIATION; VAPOR DEPOSITION; ZINC OXIDE; ZIRCONIUM;

OXIDE FILMS;

EID: 79955533003 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.3575161 Document Type: Article

Times cited : (38)

References (30)

1
- 0034247086
- Brian G. Lewis and David C. Paine, MRS Bull., 25, 22 (2000).
- (2000) MRS Bull. , vol.25 , pp. 22
- Lewis, B.G.¹ Paine, D.C.²

2
- 0033618561
- Photovoltaic technology: The case for thin-film solar cells
- DOI 10.1126/science.285.5428.692
- A. Shah, P. Torres, R. Tscharner, N. Wyrsch, and H. Keppner, Science, 285, 692 (1999). 10.1126/science.285.5428.692 (Pubitemid 29484530)
- (1999) Science , vol.285 , Issue.5428 , pp. 692-698
- Shah, A.¹ Torres, P.² Tscharner, R.³ Wyrsch, N.⁴ Keppner, H.⁵

3
- 0037011185
- Doped ZnO thin films as anode materials for organic light-emitting diodes
- DOI 10.1016/S0040-6090(02)00836-2, PII S0040609002008362
- H. Kim, J. S. Horwitz, W. H. Kim, A. J. Makinen, Z. H. Kafafi, and D. B. Chrisey, Thin Solid Films, 420-421, 539 (2002). 10.1016/S0040-6090(02)00836-2 (Pubitemid 35459773)
- (2002) Thin Solid Films , vol.420-421 , pp. 539-543
- Kim, H.¹ Horwitz, J.S.² Kim, W.H.³ Makinen, A.J.⁴ Kafafi, Z.H.⁵ Chrisey, D.B.⁶

4
- 0032606580
- 10.1063/1.124122
- H. Kim, A. Pique, J. S. Horwitz, H. Mattoussi, H. Murata, Z. H. Kafafi, and D. B. Chrisey, Appl. Phys. Lett., 74, 3444 (1999). 10.1063/1.124122
- (1999) Appl. Phys. Lett. , vol.74 , pp. 3444
- Kim, H.¹ Pique, A.² Horwitz, J.S.³ Mattoussi, H.⁴ Murata, H.⁵ Kafafi, Z.H.⁶ Chrisey, D.B.⁷

5
- 0000162419
- 10.1063/1.371708
- H. Kim, C. M. Gilmore, A. Pique, J. S. Horwitz, H. Mattoussi, H. Murata, Z. H. Kafafi, and D. B. Chrisey, J. Appl. Phys., 86, 6451 (1999). 10.1063/1.371708
- (1999) J. Appl. Phys. , vol.86 , pp. 6451
- Kim, H.¹ Gilmore, C.M.² Pique, A.³ Horwitz, J.S.⁴ Mattoussi, H.⁵ Murata, H.⁶ Kafafi, Z.H.⁷ Chrisey, D.B.⁸

6
- 33747455324
- Role of hydrogen plasma on electrical and optical properties of ZGO, ITO and IZO transparent and conductive coatings
- DOI 10.1016/j.tsf.2005.12.057, PII S0040609005023977
- L. Raniero, I. Ferreira, A. Pimentel, A. Goncalves, P. Canhola, E. Fortunato, and R. Martins, Thin Solid Films, 511-512, 295 (2006). 10.1016/j.tsf.2005.12.057 (Pubitemid 44255781)
- (2006) Thin Solid Films , vol.511-512 , pp. 295-298
- Raniero, L.¹ Ferreira, I.² Pimentel, A.³ Goncalves, A.⁴ Canhola, P.⁵ Fortunato, E.⁶ Martins, R.⁷

7
- 27944467178
- Transparent conducting zirconium-doped zinc oxide films prepared by rf magnetron sputtering
- DOI 10.1016/j.apsusc.2005.02.131, PII S0169433205006239
- M. Lv, X. Xiu, Z. Pang, Y. Dai, and S. Han, Appl. Surf. Sci., 252, 2006 (2005). 10.1016/j.apsusc.2005.02.131 (Pubitemid 41668454)
- (2005) Applied Surface Science , vol.252 , Issue.5 , pp. 2006-2011
- Lv, M.¹ Xiu, X.² Pang, Z.³ Dai, Y.⁴ Han, S.⁵

8
- 85013840926
- Elsevier, Oxford.
- C. Jagadish and S. J. Pearton, Zinc Oxide: Bulk, Thin Films and Nanostructures, Elsevier, Oxford (2006).
- (2006) Zinc Oxide: Bulk, Thin Films and Nanostructures
- Jagadish, C.¹ Pearton, S.J.²

9
- 0001461627
- 10.1063/1.125740
- H. Kim, C. M. Gilmore, J. S. Horwitz, A. Pique, H. Murata, G. P. Kushto, R. Schlaf, Z. H. Kafafi, and D. B. Chrisey, Appl. Phys. Lett., 76, 259 (2000). 10.1063/1.125740
- (2000) Appl. Phys. Lett. , vol.76 , pp. 259
- Kim, H.¹ Gilmore, C.M.² Horwitz, J.S.³ Pique, A.⁴ Murata, H.⁵ Kushto, G.P.⁶ Schlaf, R.⁷ Kafafi, Z.H.⁸ Chrisey, D.B.⁹

10
- 0033170248
- Optical, electrical and structural properties of sol gel ZnO:Al coatings
- DOI 10.1016/S0040-6090(99)00211-4
- T. Schuler, and M. A. Aegerter, Thin Solid Films, 351, 125 (1999). 10.1016/S0040-6090(99)00211-4 (Pubitemid 32213742)
- (1999) Thin Solid Films , vol.351 , Issue.1-2 , pp. 125-131
- Schuler, T.¹ Aegerter, M.A.²

11
- 0003759821
- Institute of Physics Publishing, Bristol.
- H. Hartnagel, A. L. Dawar, A. K. Jain, and C. Jagadish, Semiconducting Transparent Thin Films, Institute of Physics Publishing, Bristol (1995).
- (1995) Semiconducting Transparent Thin Films
- Hartnagel, H.¹ Dawar, A.L.² Jain, A.K.³ Jagadish, C.⁴

12
- 0344066238
- 10.1063/1.1623933
- H. Kim, J. S. Horwitz, W. H. Kim, S. B. Qadri, and Z. H. Kafafi, Appl. Phys. Lett., 83, 3809 (2003). 10.1063/1.1623933
- (2003) Appl. Phys. Lett. , vol.83 , pp. 3809
- Kim, H.¹ Horwitz, J.S.² Kim, W.H.³ Qadri, S.B.⁴ Kafafi, Z.H.⁵

13
- 38649104837
- Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering
- DOI 10.1016/j.tsf.2007.06.173, PII S0040609007011133
- M. Lv, X. Xiu, Z. Pang, Y. Dai, L. Ye, C. Cheng, and S. Han, Thin Solid Films, 516, 2017 (2008). 10.1016/j.tsf.2007.06.173 (Pubitemid 351174195)
- (2008) Thin Solid Films , vol.516 , Issue.8 , pp. 2017-2021
- Lv, M.¹ Xiu, X.² Pang, Z.³ Dai, Y.⁴ Ye, L.⁵ Cheng, C.⁶ Han, S.⁷

14
- 0037420051
- 10.1016/S0254-0584(02)00454-6
- G. K. Paul, S. Bandyopadhyay, S. K. Sen, and S. Sen, Mater. Chem. Phys., 79, 71 (2003). 10.1016/S0254-0584(02)00454-6
- (2003) Mater. Chem. Phys. , vol.79 , pp. 71
- Paul, G.K.¹ Bandyopadhyay, S.² Sen, S.K.³ Sen, S.⁴

15
- 0023329986
- Optical absorption and photoconductivity in amorphous indium selenide thin films
- DOI 10.1016/0040-6090(87)90320-8
- M. Di Giulio, G. Micocci, R. Rella, P. Siciliano, and A. Tepore, Thin Solid Films, 148, 273 (1987). 10.1016/0040-6090(87)90320-8 (Pubitemid 17566349)
- (1987) Thin Solid Films , vol.148 , Issue.3 , pp. 273-278
- Di Giulio, M.¹ Micocci, G.² Rella, R.³ Siciliano, P.⁴ Tepore, A.⁵

16
- 33646202250
- 10.1103/PhysRev.93.632
- E. Burstein, Phys. Rev., 93, 632 (1954). 10.1103/PhysRev.93.632
- (1954) Phys. Rev. , vol.93 , pp. 632
- Burstein, E.¹

17
- 0037420051
- 10.1016/S0254-0584(02)00454-6
- G. K. Paul, S. Bandyopadhyay, S. K. Sen, and S. Sen, Mater. Chem. Phys., 79, (2003) 71. 10.1016/S0254-0584(02)00454-6
- (2003) Mater. Chem. Phys. , vol.79 , pp. 71
- Paul, G.K.¹ Bandyopadhyay, S.² Sen, S.K.³ Sen, S.⁴

18
- 0000077246
- 10.1002/pssb.v15:2
- J. Tanc, R. Grigorovici, and A. Vancu, Phys. Status. Solidi., 15, 627 (1966). 10.1002/pssb.v15:2
- (1966) Phys. Status. Solidi. , vol.15 , pp. 627
- Tanc, J.¹ Grigorovici, R.² Vancu, A.³

19
- 0035440751
- Rapid thermal chemical vapor deposition of zirconium oxide for metal-oxide-semiconductor field effect transistor application
- DOI 10.1116/1.1396639
- J. P. Chang, Y.-S. Lin, and K. Chu, J. Vac. Sci. Technol., B19, 1782 (2001). 10.1116/1.1396639 (Pubitemid 33008424)
- (2001) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.19 , Issue.5 , pp. 1782-1787
- Chang, J.P.¹ Lin, Y.-S.² Chu, K.³

20
- 0142109458
- Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films
- DOI 10.1063/1.121620, PII S0003695198033257
- Z. K. Tang, G. K. L. Wong, P. Yu, M. Kawasaki, A. Ohtomo, H. Koinuma, and Y. Segawa, Appl. Phys. Lett., 72, 3270 (1998). 10.1063/1.121620 (Pubitemid 128673625)
- (1998) Applied Physics Letters , vol.72 , Issue.25 , pp. 3270-3272
- Tang, Z.K.¹ Wong, G.K.L.² Yu, P.³ Kawasaki, M.⁴ Ohtomo, A.⁵ Koinuma, H.⁶ Segawa, Y.⁷

21
- 0031209786
- 10.1016/S0038-1098(97)00216-0
- P. Zu, Z. K. Tang, G. K. L. Wong, M. Kawasaki, A. Ohtomo, H. Koinuma, and Y. Segawa, Solid State Commun., 103, 459 (1997). 10.1016/S0038-1098(97)00216-0
- (1997) Solid State Commun. , vol.103 , pp. 459
- Zu, P.¹ Tang, Z.K.² Wong, G.K.L.³ Kawasaki, M.⁴ Ohtomo, A.⁵ Koinuma, H.⁶ Segawa, Y.⁷

22
- 29844445756
- Self-assembled ZnO nano-crystals and exciton lasing at room temperature
- DOI 10.1016/j.jcrysgro.2005.10.062, PII S0022024805011930, Proceedings of the International Conference on Materials for Advanced Technologies (ICMAT 2005) Symposium N ZnO and Related Materilas
- Z. K. Tang, M. Kawasaki, A. Ohtomo, H. Koinuma, and Y. Segawa, J. Cryst. Growth, 287, 169 (2006). 10.1016/j.jcrysgro.2005.10.062 (Pubitemid 43038842)
- (2006) Journal of Crystal Growth , vol.287 , Issue.1 , pp. 169-179
- Tang, Z.K.¹ Kawasaki, M.² Ohtomo, A.³ Koinuma, H.⁴ Segawa, Y.⁵

23
- 33646702578
- Exciton related stimulated emission in ZnO polycrystalline thin film deposited by filtered cathodic vacuum arc technique
- DOI 10.1063/1.2202728
- X. H. Zhang, S. J. Chua, A. M. Yong, H. D. Li, S. F. Yu, and S. P. Lau, Appl. Phys. Lett., 88, 191112 (2006). 10.1063/1.2202728 (Pubitemid 43736681)
- (2006) Applied Physics Letters , vol.88 , Issue.19 , pp. 191112
- Zhang, X.H.¹ Chua, S.J.² Yong, A.M.³ Li, H.D.⁴ Yu, S.F.⁵ Lau, S.P.⁶

24
- 1542713832
- High temperature excitonic stimulated emission from ZnO epitaxial layers
- DOI 10.1063/1.122077, PII S000369519800134X
- D. M. Bagnall, Y. F. Chen, Z. Zhu, T. Yao, M. Y. Shen, and T. Goto, Appl. Phys. Lett., 73, 1038 (1998). 10.1063/1.122077 (Pubitemid 128671749)
- (1998) Applied Physics Letters , vol.73 , Issue.8 , pp. 1038-1040
- Bagnall, D.M.¹ Chen, Y.F.² Zhu, Z.³ Yao, T.⁴ Shen, M.Y.⁵ Goto, T.⁶

25
- 0035848187
- 10.1063/1.1355665
- Y. Chen, N. T. Tuan, Y. Segawa, H.-j. Ko, S.-k. Hong, and T. Yao, Appl. Phys. Lett., 78, 1469 (2001). 10.1063/1.1355665
- (2001) Appl. Phys. Lett. , vol.78 , pp. 1469
- Chen, Y.¹ Tuan, N.T.² Segawa, Y.³ Ko, H.-J.⁴ Hong, S.-K.⁵ Yao, T.⁶

26
- 2542472520
- 10.1063/1.1713034
- U. Ozgur, A. Teke, C. Liu, S.-J. Cho, H. Morkoc, and H. O. Everitt, Appl. Phys. Lett., 84, 3223 (2004). 10.1063/1.1713034
- (2004) Appl. Phys. Lett. , vol.84 , pp. 3223
- Ozgur, U.¹ Teke, A.² Liu, C.³ Cho, S.-J.⁴ Morkoc, H.⁵ Everitt, H.O.⁶

27
- 33746791880
- Lowering of stimulated emission threshold of zinc oxide by doping with thermally diffused aluminum supplied from sapphire substrate
- DOI 10.1063/1.2209884
- Y.-G. Wang, N. Ohashi, Y. Wada, I. Sakaguchi, T. Ohgaki, and H. Haneda, J. Appl. Phys., 100, 023524 (2006). 10.1063/1.2209884 (Pubitemid 44179536)
- (2006) Journal of Applied Physics , vol.100 , Issue.2 , pp. 023524
- Wang, Y.-G.¹ Ohashi, N.² Wada, Y.³ Sakaguchi, I.⁴ Ohgaki, T.⁵ Haneda, H.⁶

28
- 7044253097
- 10.1063/1.1778216
- X. Q. Zhang, I. Suemune, H. Kumano, J. Wang, and S. H. Huang, J. Appl. Phys., 96, 3733 (2004). 10.1063/1.1778216
- (2004) J. Appl. Phys. , vol.96 , pp. 3733
- Zhang, X.Q.¹ Suemune, I.² Kumano, H.³ Wang, J.⁴ Huang, S.H.⁵

29
- 36449001665
- 10.1063/1.114222
- X. H. Zhang, T. J. Schmidt, W. Shan, J. J. Song, and B. Goldenberg, Appl. Phys. Lett., 66, 1 (1995). 10.1063/1.114222
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1
- Zhang, X.H.¹ Schmidt, T.J.² Shan, W.³ Song, J.J.⁴ Goldenberg, B.⁵

30
- 0000027240
- 10.1063/1.117267
- D. Wiesmann, I. Brener, L. Pfeiffer, M. A. Khan, and C. J. Sun, Appl. Phys. Lett., 69, 3384 (1996). 10.1063/1.117267
- (1996) Appl. Phys. Lett. , vol.69 , pp. 3384
- Wiesmann, D.¹ Brener, I.² Pfeiffer, L.³ Khan, M.A.⁴ Sun, C.J.⁵

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