Growth of transparent conductive oxide ZnO films by atomic layer deposition

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 5 B, 1996, Pages

  Sang, Baosheng ^a   Konagai, Makoto ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; DEPOSITION; ELECTRIC PROPERTIES; ELECTRON TRANSPORT PROPERTIES; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; SURFACES; TRANSPARENCY; WATER; ZINC OXIDE;

ATOMIC LAYER DEPOSITION; CONDUCTIVE ZINC OXIDE FILMS; DIETHYLZINC; HIGH ELECTRON MICROSCOPY; SELF LIMITING GROWTH;

CONDUCTIVE FILMS;

EID: 0030149010     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.l602     Document Type: Article

References (8)