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Superlattices and Microstructures

Volumn 39, Issue 1-4, 2006, Pages 24-32

Structural and optical properties of high quality ZnO films on Si grown by atomic layer deposition at low temperatures

(4) Lee, S a Im, Y H a Kim, S H a Hahn, Y B a

a Chonbuk National University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; FILM GROWTH; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; SILICON; THIN FILMS;

ATOMIC LAYER DEPOSITION; BUFFER LAYER GROWTH; CRYSTALLINE QUALITY; TWO-STEP GROWTH;

ZINC OXIDE;

EID: 29444438002 PISSN: 07496036 EISSN: 10963677 Source Type: Journal
DOI: 10.1016/j.spmi.2005.08.028 Document Type: Article

Times cited : (23)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.