SCOPUS 정보 검색 플랫폼

ECS Transactions

Volumn 41, Issue 2, 2011, Pages 247-253

Study of atomic layer deposition of ZnO on a polar oxide substrate by in-situ quartz crystal microbalance

(2) Pradhan, K a Lyman, P F a

a UNIVERSITY OF WISCONSIN MILWAUKEE (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALS; DEIONIZED WATER; FILM GROWTH; GROWTH RATE; II-VI SEMICONDUCTORS; MAGNESIA; METALLIC FILMS; OPTICAL FILMS; OXIDE FILMS; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS; ZINC OXIDE;

DIETHYL ZINC; EX SITU; POLAR OXIDES; PULSE TIME; SITU QUARTZ CRYSTAL MICROBALANCE; TEMPERATURE WINDOW; ZNO FILMS; ZNO THIN FILM;

ATOMIC LAYER DEPOSITION;

EID: 84857247415 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.3633674 Document Type: Conference Paper

Times cited : (5)

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