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Volumn 1-10, Issue , 2012, Pages 251-274

7.13 - Nanoimprint Lithography of Polymers

Author keywords

Embedded functionality; Functional materials; Microelectronics; Microfluidics; Nanofluidics; Nanoimprint lithography; Patterned magnetic storage; Roll to roll nanoimprint lithography; Step and flash imprint lithography; Thermal nanoimprint lithography; Thermoplastic materials; Thermoset materials; Ultraviolet assisted nanoimprint lithography

Indexed keywords


EID: 84884940470     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-0-444-53349-4.00194-1     Document Type: Chapter
Times cited : (7)

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    • (2009)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.