Thermal analysis for step and flash imprint lithography during UV curing process

Microelectronic Engineering

Volumn 83, Issue 2, 2006, Pages 213-217

  Kim, Eui Kyoon ^a   Willson, C Grant ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Acrylate and vinyl ether; Finite element model; Step and flash imprint lithography; Thermal analysis

Indexed keywords

ACRYLIC MONOMERS; CURING; ETHERS; LITHOGRAPHY; PHOTOPOLYMERIZATION; POLYMERIZATION; TRANSPARENCY; ULTRAVIOLET DEVICES;

ACRYLATE AND VINYL ETHER; FINITE ELEMENT MODELS; MATERIAL DEGRADATION; STEP AND FLASH IMPRINT LITHOGRAPHY;

THERMOANALYSIS;

EID: 32044435133     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.08.007     Document Type: Article

References (17)

1. S.Y. Chou, P.R. Krauss, and P.J. Renstrom J. Vac. Sci. Technol. B 14 1996 4129 4133
2. M. Colburn, S. Johnson, M. Stewart, S. Damle, T. Bailey, B.J. Choi, M. Wedlake, T. Michaelson, S.V. Sreenivasan, J. Ekerdt, and C.G. Willson Proc. SPIE 3676 1999 379 389
3. S.V. Sreenivasan, C.G. Willson, N.E. Schumaker, and D.J. Resnick Proc. SPIE 4688 2002 903 909
4. S.Y. Chou, P.R. Krauss, W. Zhang, L. Guo, and L. Zhuang J. Vac. Sci. Technol. B 15 1997 2897 2904
5. S.C. Johnson, T.C. Bailey, M.D. Dickey, B.J. Smith, E.K. Kim, A.T. Jamieson, N.A. Stacey, J.G. Ekerdt, and C.G. Willson Proc. SPIE 5037 2003 197 202
6. E.K. Kim, N.A. Stacey, B.J. Smith, M.D. Dickey, S.C. Johnson, B.C. Trinque, and C.G. Willson J. Vac. Sci. Technol. B 22 2004 131 135
7. G. Odian Principles of Polymerization third ed. 1991 John Wiley & Sons New York
8. B. Shamoun, R. Engelstad, and D. Trost J. Vac. Sci. Technol. B 16 1998 3558 3562
9. J.E. Mark Physical Properties of Polymers Handbook 1996 American Institute of Physics New York
10. D.R. Lide CRC Handbook of Chemistry and Physics 73rd ed. 1992 CRC Press Florida
11. V. Krevelen Properties of Polymer third ed. 1990 Elsevier Scientific Publishing Co. Amsterdam
12. J. Bicerano Prediction of Polymer Properties third ed. 2002 Marcel Dekker Inc. New York
13. Silicon Carbide, SiC. , 2005 (accessed 29.07.05).
14. K. Lee, J. Kim, and B. Lee J. Appl. Polym. Sci. 81 2001 2929 2935
15. A.J. Holder, J.A. Morrill, D.A. White, J.D. Eick, and C.C. Chappelow Theochem. 507 2000 63 73
16. C.C. Chappelow, C.S. Pinzino, M.D. Power, A.J. Holder, J.A. Morrill, L. Jeang, and J.D. Eick J. Appl. Polym. Sci. 86 2002 314 326
17. C. Decker, C. Bianchi, D. Decker, and F. Morel Prog. Org. Coat. 42 2001 253 266