Imprinted electrically conductive patterns from a polyaniline blend

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 2, 2001, Pages 487-489

  Makela T ^b   Haatainen, T ^b   Ahopelto, J ^b   Isotalo, H ^a  

^a CENTRE FOR METROLOGY AND ACCREDITATION MIKES   (Finland)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CONDUCTIVE FILMS; CONDUCTIVE PLASTICS; ELECTRIC CONDUCTIVITY; MIXTURES; PLASMA ETCHING; POLYMER BLENDS; PRESSURE EFFECTS; SEMICONDUCTING SILICON; SPIN COATING; THERMAL EFFECTS;

CRESOL; DEEP GRATING; IMPRINTING THREE DIMENSIONAL PATTERNS; POLYANILINE BLEND; POLYMER RIDGES; RESIDUAL FILM;

LITHOGRAPHY;

EID: 0035271323     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1354979     Document Type: Article

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