Fabrication of glass microstructures by micro-molding of sol-gel precursors

Advanced Materials

Volumn 10, Issue 8, 1998, Pages 571-574

  Marzolin, Christian ^a   Smith, Stephen P ^b   Prentiss, Mara ^b   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; ETCHING; MOLDING; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SOL-GELS; SUBSTRATES; SUSPENSIONS (FLUIDS); TITANIUM COMPOUNDS;

RAPID ION ETCHING; TITANOSILICATE GLASS;

GLASS MANUFACTURE;

EID: 0032474326     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-4095(199805)10:8<571::AID-ADMA571>3.0.CO;2-P     Document Type: Article

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