메뉴 건너뛰기




Volumn 16, Issue 5, 2005, Pages

Fabrication of polymer photonic crystals using nanoimprint lithography

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRON BEAM LITHOGRAPHY; NANOTECHNOLOGY; OPTIMIZATION; PHOTONS; POLYMETHYL METHACRYLATES; RHEOLOGY; THIN FILMS;

EID: 24144477520     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/5/023     Document Type: Conference Paper
Times cited : (66)

References (10)
  • 2
    • 18644386140 scopus 로고    scopus 로고
    • Nanoimprinted passive optical devices
    • Seekamp J et al 2002 Nanoimprinted passive optical devices Nanotechnology 13 581-6
    • (2002) Nanotechnology , vol.13 , pp. 581-586
    • Seekamp, J.1
  • 3
    • 0038697353 scopus 로고    scopus 로고
    • High volume fabrication of customised nanopore membrane chips
    • Heyderman L J et al 2003 High volume fabrication of customised nanopore membrane chips Microelectron. Eng. 67/68 208-13
    • (2003) Microelectron. Eng. , vol.67-68 , pp. 208-213
    • Heyderman, L.J.1
  • 5
    • 13244257272 scopus 로고    scopus 로고
    • Photonic crystals in polymers by direct electron-beam lithography presenting a phonic band gap
    • Panepucci R R, Kim B H, Almeida V R and Jones M D 2004 Photonic crystals in polymers by direct electron-beam lithography presenting a phonic band gap J. Vac. Sci. Technol. B 22 (6)
    • (2004) J. Vac. Sci. Technol. B , vol.22 , Issue.6
    • Panepucci, R.R.1    Kim, B.H.2    Almeida, V.R.3    Jones, M.D.4
  • 6
    • 0037682242 scopus 로고    scopus 로고
    • Local mass transport and its effect on global pattern replication during hot embossing
    • Schulz H, Wissen M and Scheer H-C 2003 Local mass transport and its effect on global pattern replication during hot embossing Microelectron. Eng. 67/68 657-63
    • (2003) Microelectron. Eng. , vol.67-68 , pp. 657-663
    • Schulz, H.1    Wissen, M.2    Scheer, H.-C.3
  • 8
    • 33645623892 scopus 로고    scopus 로고
    • ed D J Lockwood (Boston/Dordrecht/London: Kluwer-Academic) Chapter for Volume on 'Alternative Lithography' ISBN 0-306-47858-7
    • Schift H and Heyderman L J 2003 Nanorheology ed D J Lockwood (Boston/Dordrecht/London: Kluwer-Academic) Chapter for Volume on 'Alternative Lithography' pp 47-76 ISBN 0-306-47858-7
    • (2003) Nanorheology , pp. 47-76
    • Schift, H.1    Heyderman, L.J.2
  • 10
    • 0942300052 scopus 로고    scopus 로고
    • Defect analysis in thermal nanoimprint lithography
    • Hirai Y, Yoshida S and Takagi N 2003 Defect analysis in thermal nanoimprint lithography J. Vac. Sci. Technol. B 21 2765-70
    • (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 2765-2770
    • Hirai, Y.1    Yoshida, S.2    Takagi, N.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.