Multilevel nanoimprint lithography with submicron alignment over 4 in. Si wafers

Applied Physics Letters

Volumn 79, Issue 6, 2001, Pages 845-847

  Zhang, Wei ^a   Chou, Stephen Y ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039189863     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1391400     Document Type: Article

References (17)

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