UV Embossing of Sub-micrometer Patterns on Biocompatible Polymeric Films Using a Focused Ion Beam Fabricated TiN Mold

Chemistry of Materials

Volumn 16, Issue 6, 2004, Pages 956-958

  Gao, J X ^b   Chan Park, M B ^a,b   Xie, D Z ^b   Yan, Y H ^a,b   Zhou, W X ^b   Ngoi, B K A ^a,b   Yue, C Y ^a,b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCOMPATIBILITY; ION BEAM LITHOGRAPHY; NANOSTRUCTURED MATERIALS; POLYMERS; THIN FILMS; TITANIUM NITRIDE; ULTRAVIOLET RADIATION;

POLYMERIC FILMS; SUBMICROMETER PATTERNING;

METALLIC FILMS;

MACROGOL DERIVATIVE; NITROGEN; POLYETHYLENEGLYCOL DIACRYLATE; RUBBER; SILICONE; TITANIUM DERIVATIVE; UNCLASSIFIED DRUG;

ARTICLE; BIOCOMPATIBILITY; HYDROPHOBICITY; MATERIAL STATE; POLYMERIZATION; STRUCTURE ANALYSIS; TECHNIQUE; ULTRAVIOLET RADIATION;

EID: 1642403042     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm0342849     Document Type: Article

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