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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 6, 2002, Pages 2857-2861

Characterization of and imprint results using indium tin oxide-based step and flash imprint lithography templates

(12) Dauksher, W J a Nordquist, K J a Mancini, D P a Resnick, D J a Baker, J H a Hooper, A E a Talin, A A a Bailey, T C b Lemonds, A M b Sreenivasan, S V b Ekerdt, J G b Willson, C G b

a MOTOROLA INC (United States)

b The University of Texas at Austin (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COMPOSITION; CRYSTAL STRUCTURE; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON BEAMS; LIGHT TRANSMISSION; LITHOGRAPHY; NUMERICAL METHODS; SCANNING ELECTRON MICROSCOPY; STRESS ANALYSIS; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON BEAM WRITING; INDIUM TIN OXIDE; STEP AND FLASH IMPRINT LITHOGRAPHY;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0036883179 PISSN: 0734211X EISSN: None Source Type: Journal
DOI: 10.1116/1.1520575 Document Type: Article

Times cited : (47)

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