메뉴 건너뛰기




Volumn 457, Issue 7231, 2009, Pages 868-872

Nanomoulding with amorphous metals

Author keywords

[No Author keywords available]

Indexed keywords

ALLOY; CHLORMETHINE; GLASS; METAL; NANOMATERIAL; POLYMER; SILICON;

EID: 60149088960     PISSN: 00280836     EISSN: 14764687     Source Type: Journal    
DOI: 10.1038/nature07718     Document Type: Article
Times cited : (680)

References (31)
  • 1
    • 0030570065 scopus 로고    scopus 로고
    • Imprint lithography with 25-nanometer resolution
    • Chou, S. Y., Krauss, P. R. & Renstrom, P. J. Imprint lithography with 25-nanometer resolution. Science 272, 85-87 (1996).
    • (1996) Science , vol.272 , pp. 85-87
    • Chou, S.Y.1    Krauss, P.R.2    Renstrom, P.J.3
  • 2
    • 34250642011 scopus 로고    scopus 로고
    • Nanoimprint lithography: Methods and material requirements
    • Guo, L. J. Nanoimprint lithography: Methods and material requirements. Adv. Mater. 19, 495-513 (2007).
    • (2007) Adv. Mater , vol.19 , pp. 495-513
    • Guo, L.J.1
  • 3
    • 34948876834 scopus 로고    scopus 로고
    • High resolution nanoimprinting with a robust and reusable polymer mold
    • Barbero, D. R. et al. High resolution nanoimprinting with a robust and reusable polymer mold. Adv. Funct. Mater. 17, 2419-2425 (2007).
    • (2007) Adv. Funct. Mater , vol.17 , pp. 2419-2425
    • Barbero, D.R.1
  • 5
    • 0029272063 scopus 로고
    • Metallic glasses
    • Greer, A. L. Metallic glasses. Science 267, 1947-1953 (1995).
    • (1995) Science , vol.267 , pp. 1947-1953
    • Greer, A.L.1
  • 6
    • 0033339158 scopus 로고    scopus 로고
    • Bulk glass-forming metallic alloys: Science and technology
    • Johnson, W. L. Bulk glass-forming metallic alloys: Science and technology. MRS Bull. 24, 42-56 (1999).
    • (1999) MRS Bull , vol.24 , pp. 42-56
    • Johnson, W.L.1
  • 7
    • 33644502522 scopus 로고    scopus 로고
    • Amorphous metal alloys form like plastics
    • Schroers, J. & Paton, N. Amorphous metal alloys form like plastics. Adv. Mater. Process. 164, 61-63 (2006).
    • (2006) Adv. Mater. Process , vol.164 , pp. 61-63
    • Schroers, J.1    Paton, N.2
  • 8
    • 18044384992 scopus 로고    scopus 로고
    • New approaches to nanofabrication: Molding, printing, and other techniques
    • Gates, B. D. et al. New approaches to nanofabrication: Molding, printing, and other techniques. Chem. Rev. 105, 1171-1196 (2005).
    • (2005) Chem. Rev , vol.105 , pp. 1171-1196
    • Gates, B.D.1
  • 9
    • 1642603474 scopus 로고    scopus 로고
    • Review on micro molding of thermoplastic polymers
    • Heckele, M. & Schomburg, W. K. Review on micro molding of thermoplastic polymers. J. Micromech. Microeng. 14, R1-R14 (2004).
    • (2004) J. Micromech. Microeng , vol.14
    • Heckele, M.1    Schomburg, W.K.2
  • 10
    • 0012752163 scopus 로고    scopus 로고
    • Sub-10 nm imprint lithography and applications
    • Chou, S. Y., Krauss, P. R. & Zhang, W. Sub-10 nm imprint lithography and applications. J. Vac. Sci. Technol. B 15, 2897-2904 (1997).
    • (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2897-2904
    • Chou, S.Y.1    Krauss, P.R.2    Zhang, W.3
  • 11
    • 0037142072 scopus 로고    scopus 로고
    • Ultrafast and direct imprint of nanostructures in silicon
    • Chou, S. Y., Keimel, C. & Gu, J. Ultrafast and direct imprint of nanostructures in silicon. Nature 417, 835-837 (2002).
    • (2002) Nature , vol.417 , pp. 835-837
    • Chou, S.Y.1    Keimel, C.2    Gu, J.3
  • 12
    • 33751425231 scopus 로고    scopus 로고
    • Large strain mechanical behavior of poly(methyl methacrylate) (PMMA) near the glass transition temperature
    • Palm, G., Dupaix, R. B. & Castro, J. Large strain mechanical behavior of poly(methyl methacrylate) (PMMA) near the glass transition temperature. Trans. Am. Soc. Mech. Eng. 128, 559-563 (2006).
    • (2006) Trans. Am. Soc. Mech. Eng , vol.128 , pp. 559-563
    • Palm, G.1    Dupaix, R.B.2    Castro, J.3
  • 13
    • 0036614058 scopus 로고    scopus 로고
    • Nano-imprint lithography using replicated mold by Ni electroforming
    • Hirai, Y., Harada, S. & Isaka, S. Nano-imprint lithography using replicated mold by Ni electroforming. Jpn. J. Appl. Phys. 1 41, 4186-4189 (2002).
    • (2002) Jpn. J. Appl. Phys. 1 , vol.41 , pp. 4186-4189
    • Hirai, Y.1    Harada, S.2    Isaka, S.3
  • 14
  • 15
    • 0034274416 scopus 로고    scopus 로고
    • X-ray characterization of residual stresses in electroplated nickel used in LIGA technique
    • Basrour, S. & Robert, L. X-ray characterization of residual stresses in electroplated nickel used in LIGA technique. Mater. Sci. Eng. A 288, 270-274 (2000).
    • (2000) Mater. Sci. Eng. A , vol.288 , pp. 270-274
    • Basrour, S.1    Robert, L.2
  • 16
    • 34250008508 scopus 로고    scopus 로고
    • Overview No.144 - Mechanical behavior of amorphous alloys
    • Schuh, C. A., Hufnagel, T. C. & Ramamurty, U. Overview No.144 - Mechanical behavior of amorphous alloys. Acta Mater. 55, 4067-4109 (2007).
    • (2007) Acta Mater , vol.55 , pp. 4067-4109
    • Schuh, C.A.1    Hufnagel, T.C.2    Ramamurty, U.3
  • 17
    • 0017482238 scopus 로고
    • Microscopic mechanism for steady-state inhomogeneous flow in metallic glasses
    • Spaepen, F. Microscopic mechanism for steady-state inhomogeneous flow in metallic glasses. Acta Metall. 25, 407-415 (1977).
    • (1977) Acta Metall , vol.25 , pp. 407-415
    • Spaepen, F.1
  • 18
    • 42749099172 scopus 로고    scopus 로고
    • Ductile bulk metallic glass
    • Schroers, J. & Johnson, W. L. Ductile bulk metallic glass. Phys. Rev. Lett. 93, 255506 (2004).
    • (2004) Phys. Rev. Lett , vol.93 , pp. 255506
    • Schroers, J.1    Johnson, W.L.2
  • 20
    • 0037634715 scopus 로고    scopus 로고
    • Timescales of crystallization and viscous flow of the bulk glass-forming Zr-Ti-Ni-Cu-Be alloys
    • Waniuk, T., Schroers, J. & Johnson, W. L. Timescales of crystallization and viscous flow of the bulk glass-forming Zr-Ti-Ni-Cu-Be alloys. Phys. Rev. B 67, 184003 (2003).
    • (2003) Phys. Rev. B , vol.67 , pp. 184003
    • Waniuk, T.1    Schroers, J.2    Johnson, W.L.3
  • 21
    • 0142023967 scopus 로고    scopus 로고
    • Cobalt-based bulk glassy alloy with ultrahigh strength and soft magnetic properties
    • Inoue, A., Shen, B. L., Koshiba, H., Kato, H. & Yavari, A. R. Cobalt-based bulk glassy alloy with ultrahigh strength and soft magnetic properties. Nature Mater. 2, 661-663 (2003).
    • (2003) Nature Mater , vol.2 , pp. 661-663
    • Inoue, A.1    Shen, B.L.2    Koshiba, H.3    Kato, H.4    Yavari, A.R.5
  • 22
    • 36849111475 scopus 로고
    • Evidence of a glass-liquid transition in a gold-germanium-silicon alloy
    • Chen, H. S. & Turnbull, D. Evidence of a glass-liquid transition in a gold-germanium-silicon alloy. J. Chem. Phys. 48, 2560-2571 (1968).
    • (1968) J. Chem. Phys , vol.48 , pp. 2560-2571
    • Chen, H.S.1    Turnbull, D.2
  • 25
    • 23044506657 scopus 로고    scopus 로고
    • The superplastic forming of bulk metallic glasses
    • Schroers, J. The superplastic forming of bulk metallic glasses. J. Miner. Met. Mater. 57, 35-39 (2005).
    • (2005) J. Miner. Met. Mater , vol.57 , pp. 35-39
    • Schroers, J.1
  • 26
    • 38349113258 scopus 로고    scopus 로고
    • Superplastic nanoforging of Pt-based metallic glass with dies of Zr-BMG and glassy carbon fabricated by focussed ion beam
    • Saotome, Y., Okaniwa, S., Kimura, H. & Inoue, A. Superplastic nanoforging of Pt-based metallic glass with dies of Zr-BMG and glassy carbon fabricated by focussed ion beam. Mater. Sci. Forum 539, 2088-2093 (2007).
    • (2007) Mater. Sci. Forum , vol.539 , pp. 2088-2093
    • Saotome, Y.1    Okaniwa, S.2    Kimura, H.3    Inoue, A.4
  • 28
    • 38549120696 scopus 로고    scopus 로고
    • Write and erase mechanisms for bulk metallic glass
    • Kumar, G. & Schroers, J. Write and erase mechanisms for bulk metallic glass. Appl. Phys. Lett. 92, 031901 (2008).
    • (2008) Appl. Phys. Lett , vol.92 , pp. 031901
    • Kumar, G.1    Schroers, J.2
  • 29
    • 10844291014 scopus 로고    scopus 로고
    • Polymer imprint lithography with molecular-scale resolution
    • Hua, F. et al. Polymer imprint lithography with molecular-scale resolution. Nano Lett. 4, 2467-2471 (2004).
    • (2004) Nano Lett , vol.4 , pp. 2467-2471
    • Hua, F.1
  • 31
    • 34147115130 scopus 로고    scopus 로고
    • Thermoplastic forming of bulk metallic glass-A technology for MEMS and microstructure fabrication
    • Schroers, J., Pham, Q. & Desai, A. Thermoplastic forming of bulk metallic glass-A technology for MEMS and microstructure fabrication. J. Microelectromech. Syst. 16, 240-247 (2007).
    • (2007) J. Microelectromech. Syst , vol.16 , pp. 240-247
    • Schroers, J.1    Pham, Q.2    Desai, A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.