Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating

Journal of Micromechanics and Microengineering

Volumn 16, Issue 10, 2006, Pages 1967-1974

  Ansari, Kambiz ^a   Van Kan, Jeroen Anton ^a   Bettiol, Andrew Anthony ^a   Watt, Frank ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROPLATING; NANOTECHNOLOGY; NICKEL; POLYMETHYL METHACRYLATES; PROTON BEAMS; ROUGHNESS MEASUREMENT; THROUGHPUT;

NANOIMPRINT LITHOGRAPHY; NICKEL ELECTROPLATING; NICKEL STAMPS; PROTON BEAM WRITING;

LITHOGRAPHY;

EID: 33748777149     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/10/008     Document Type: Article

References (24)

1. Chou S Y, Krauss P R and Renstrom P J 1995 Appl. Phys. Lett. 67 3114
2. Haisma J, Verheijen M, van der Heuvel K and van der Berg J 1996 J. Vac. Sci. Technol. B 14 4124
3. Kim E, Xia Y and Whitesides G M 1995 Nature 376 581
4. Taniguchi J, Tokano Y, Miyamoto I, Komuro M and Hiroshima H 2002 Nanotechnology 13 592
5. Li M T 2003 PhD Thesis Princeton University, Princeton
6. Maximov I, Sarwe E-L, Beck M, Deppert K, Graczyk M, Magnusson M H and Montelius L 2002 Microelectron. Eng. 449 4367
7. Pfeiffer K et al 2002 Microelectron. Eng. 61-62 393
8. Schulz H, Lyebyedyev D, Scheer H-C, Pfeiffer K, Bleidiessel G, Grutzner G and Ahopelto J 2000 J. Vac. Sci. Technol. B 18 3582
9. Heidari B, Maximov I and Montelius L 1999 J. Vac. Sci. Technol. B 17 2961
10. Hirai Y, Kikuta H, Harada S and Tanaka Y 2002 J. Vac. Sci. Technol. B 20 2867
11. van Kan J A, Bettiol A A and Watt F 2006 Nano Lett. 6 579
12. van Kan J A, Bettiol A A and Watt F 2003 Appl. Phys. Lett. 83 1629-31
13. Bettiol A A, Sum T C, Cheong F C, Sow C H, Rao S V, van Kan J A, Teo E J, Ansari K and Watt F 2005 Nucl. Instrum. Methods B 231 364-71
14. Breese M B H, Teo E J, Mangaiyarkarasi D, Champeaux F, Bettiol A A and Blackwood D 2005 Nucl. Instrum. Methods B 231 357-63
15. van Kan J A, Bettiol A A, Ansari K, Shao P and Watt F 2004 Proc. IEEE pp 673-6
16. Tang P T 2001 Electrochim. Acta 47 61
17. Kanigicherla V K P, Kelly K W, Ma E, Wang W and Murphy M C 1998 Microsyst. Technol. 4 77
18. Zeng K and Shen L 2002 Phil. Mag. A 82 2223
19. Fritz T, Mokwa W and Schnakenberg U 2001 Electrochim. Acta 47 55
20. Zeng K and Chiu Ch 2001 Acta Mater. 49 3539
21. Ross R B 1992 Metallic Materials Specification Handbook 4th edn (London: Chapman and Hall)
22. Lowenheim F 1978 Electroplating (New York: McGraw-Hill)
23. van Kan J A, Bettiol A A and Watt F 2001 Nucl. Instrum. Methods A 181 258
24. Roos N, Glinsner T and Scheer H-C 2003 Proc. SPIE 5037 211