Room-temperature nanoimprint and nanotransfer printing using hydrogen silsequioxane

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 2, 2003, Pages 688-692

  Matsui, S ^a   Igaku, Y ^a   Ishigaki, H ^a   Fujita, J ^b   Ishida, M ^b   Ochiai, Y ^b   Namatsu, H ^c   Komuro, M ^d  

^a UNIVERSITY OF HYOGO   (Japan)

^b NEC CORPORATION   (Japan)

^c Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; GOLD; LITHOGRAPHY; ORGANIC COMPOUNDS; PRINTING; SUBSTRATES; THERMAL EXPANSION;

NANOIMPRINTS;

NANOTECHNOLOGY;

ADHESION; GOLD; LITHOGRAPHY; ORGANIC COMPOUNDS; PRINTING; SUBSTRATES; THERMAL EXPANSION;

EID: 0037274001     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1545754     Document Type: Article

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