Roller nanoimprint lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3926-3928

  Tan, Hua ^a   Gilbertson, Andrew ^b   Chou, Stephen Y ^a  

^a Princeton University   (United States)

^b University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000373843     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590438     Document Type: Article

References (7)

1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995); Science 272, 85 (1996).
2. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995); Science 272, 85 (1996).
3. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, J. Vac. Sci. Technol. B 14, 4129 (1996).
4. G. H. Conroy, IEEE Trans. Ind. Appl. 30, 561 (1994).
5. A. J. Kreisberg, IEEE Trans. Ind. Appl. 28, 954 (1992).
6. S. Y. Chou (unpublished).
7. W. Wu, B. Cui, X. Sun, W. Zhang, and S. Y. Chou, Presented at EIPBN'98 (unpublished).