Siloxane polymers for high-resolution, high-accuracy soft lithography

Macromolecules

Volumn 33, Issue 8, 2000, Pages 3042-3049

  Schmid, H ^a   Michel, B ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSION TESTING; CROSSLINKING; DENSITY (SPECIFIC GRAVITY); ELASTICITY; ELASTOMERS; HARDNESS; LITHOGRAPHY;

HIGH-ACCURACY SOFT LITHOGRAPHY;

SILICONES;

EID: 0033742531     PISSN: 00249297     EISSN: None     Source Type: Journal    
DOI: 10.1021/ma982034l     Document Type: Article

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