Heterogeneous three-dimensional electronics by use of printed semiconductor nanomaterials

Science

Volumn 314, Issue 5806, 2006, Pages 1754-1757

  Ahn, Jong Hyun ^a,b   Kim, Hoon Sik ^a   Lee, Keon Jae ^a   Jeon, Seokwoo ^a,b   Kang, Seong Jun ^a,b   Sun, Yugang ^a,b   Nuzzo, Ralph G ^a,b   Rogers, John A ^a,b  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIVES; CARBON NANOTUBES; ELECTRONIC EQUIPMENT; GALLIUM NITRIDE; INTEGRATED CIRCUIT LAYOUT; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES;

NANOSCALE WIRES; RIBBONS; SEMICONDUCTOR NANOMATERIALS; THREE-DIMENSIONAL ELECTRONICS;

NANOSTRUCTURED MATERIALS;

ARSENIC DERIVATIVE; GALLIUM; NANOMATERIAL; SILICON; SINGLE WALLED NANOTUBE;

ELECTRONIC EQUIPMENT; NANOTECHNOLOGY; SEMICONDUCTOR INDUSTRY; TECHNOLOGICAL DEVELOPMENT;

ARTICLE; CONDUCTANCE; CONFOCAL MICROSCOPY; DEVICE; ELECTRONICS; ILLUMINATION; PRIORITY JOURNAL; SEMICONDUCTOR; SIMULATION; SYNTHESIS; TECHNIQUE; TEMPERATURE DEPENDENCE; THICKNESS;

EID: 33845691203     PISSN: 00368075     EISSN: 10959203     Source Type: Journal    
DOI: 10.1126/science.1132394     Document Type: Article

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27. The research was supported by the U.S. Department of Energy, Division of Materials Sciences under award no. DEFG02-91ER4S439, through the Frederick Seitz Materials Research Laboratory (FS-MRL). We thank T. Banks and K. Colravy for help with cleanroom and other facilities at the Frederick Seitz Materials Research Laboratory and H. C. Ko, Q. Cao, P. Ferreira, J. Dong, and E. Menard for help with printing and distortion measurements using facilities and manufacturing approaches developed at the Center for Nanoscale Chemical Electrical Mechanical Manufacturing Systems at the University of Illinois (funded by the NSF under grant DMI-0328162). All imaging and surface analysis was performed at the FS-MRL Center for Microanalysis of Materials at the University of Illinois at Urbana-Champaign, supported by award no. DEFG02-91ER4S439.