DNA nanopatterning with self-organization by using nanoimprint

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3275-3278

  Ohtake, Toshihito ^a   Nakamatsu, Ken Ichiro ^b   Matsui, Shinji ^b   Tabata, Hitoshi ^c   Kawai, Tomoji ^c  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

^c OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL EQUIPMENT; DNA; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; ELECTRON TRANSPORT PROPERTIES; ENERGY GAP; FLUORESCENCE; IRRADIATION; OXIDATION; POLYVINYL ALCOHOLS; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SELF ASSEMBLY; ULTRAVIOLET RADIATION;

BIODEVICES; FLUORESCENCE MICROSCOPY; NANOIMPRINT LITHOGRAPHY (NIL); NANOPATTERNING;

NANOTECHNOLOGY;

EID: 13244267390     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1823438     Document Type: Conference Paper

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