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Volumn 14, Issue 6, 1996, Pages 4129-4133
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Nanoimprint lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 5344241941
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.588605 Document Type: Article |
Times cited : (1819)
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References (13)
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