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Volumn 14, Issue 6, 1996, Pages 4129-4133

Nanoimprint lithography

Author keywords

[No Author keywords available]

Indexed keywords


EID: 5344241941     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588605     Document Type: Article
Times cited : (1819)

References (13)
  • 7
    • 0142037327 scopus 로고
    • S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995); Science 272, 85 (1986); P. R. Krauss and S. Y. Chou, the 39th EIPB, Scottsdale, AZ, May 30-June 2, 1995 [J. Vac. Sci. Technol. B 13, 2850 (1995)].
    • (1995) Appl. Phys. Lett. , vol.67 , pp. 3114
    • Chou, S.Y.1    Krauss, P.R.2    Renstrom, P.J.3
  • 8
    • 0142037327 scopus 로고
    • S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995); Science 272, 85 (1986); P. R. Krauss and S. Y. Chou, the 39th EIPB, Scottsdale, AZ, May 30-June 2, 1995 [J. Vac. Sci. Technol. B 13, 2850 (1995)].
    • (1986) Science , vol.272 , pp. 85
  • 9
    • 0142037327 scopus 로고
    • Scottsdale, AZ, May 30-June 2
    • S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995); Science 272, 85 (1986); P. R. Krauss and S. Y. Chou, the 39th EIPB, Scottsdale, AZ, May 30-June 2, 1995 [J. Vac. Sci. Technol. B 13, 2850 (1995)].
    • (1995) 39th EIPB
    • Krauss, P.R.1    Chou, S.Y.2
  • 10
    • 0142037327 scopus 로고
    • S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995); Science 272, 85 (1986); P. R. Krauss and S. Y. Chou, the 39th EIPB, Scottsdale, AZ, May 30-June 2, 1995 [J. Vac. Sci. Technol. B 13, 2850 (1995)].
    • (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 2850


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.