Graphoepitaxy of cylinder-forming block copolymers for use as templates to pattern magnetic metal dot arrays

Nanotechnology

Volumn 16, Issue 7, 2005, Pages

  Xiao, Shuaigang ^a   Yang, Xiaomin ^b   Edwards, Erik W ^a   La, Young Hye ^a   Nealey, Paul F ^a  

^a University of Wisconsin Madison   (United States)

^b SEAGATE RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; DEPOSITION; ELECTRON BEAM LITHOGRAPHY; EPITAXIAL GROWTH; ION BEAMS; MAGNETIC RECORDING; PLASTIC FILMS; REACTIVE ION ETCHING; TOPOLOGY; WETTING;

FOCUSED ION BEAM (FIB); GRAPHOEPITAXY; INTERFEROMETRIC LITHOGRAPHY (IL); MAGNETIC METAL DOT ARRAYS;

BLOCK COPOLYMERS;

EID: 21144445669     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/7/003     Document Type: Article

References (25)

1. Weller D and Doerner M F 2000 Annu. Rev. Mater. Sci. 30 611
2. Moser A, Takano K, Margulies D T, Albrecht M, Sonobe Y, Ikeda Y, Sun S and Fullerton E E 2002 J. Phys. D: Appl. Phys. 35 R157
3. Ross C A 2001 Annu. Rev. Mater. Res. 31 203
4. Vieu C, Carcenac F, Pépin A, Chen Y, Mejias M, Lebib A, Manin-Ferlazzo L, Couraud L and Launois H 2000 Appl. Surf. Sci. 164 111
5. Chou S Y, Krauss P R, Zhang W, Guo L and Zhuang L 1997 J. Vac. Sci. Technol. B 15 2897
6. Carcenac F, Vieu C, Lebib A, Chen Y, Manin-Ferlazzo L and Launois H 2000 Microelectron. Eng. 53 163
7. Savas T A, Farhoud M, Smith H I, Hwang M and Ross C A 1999 J. Appl. Phys. 85 6160
8. Rettner C T, Best M E and Terris B D 2001 IEEE Trans. Magn. 37 1649
9. Thurn-Albrecht T, Schotter J, Kastle G A, Emley N, Shibauchi T, Krusin-Elbaum L, Guarini K W, Black C T, Tuominen M T and Russell T P 2000 Science 290 2126
10. Naito K, Hieda H, Sakurai M, Kamata Y and Asakawa K 2002 IEEE Trans. Magn. 38 1949
11. Cheng J Y, Ross C A, Chan V Z-H, Thomas E L, Lammertink R G H and Vancso G J 2001 Adv. Mater. 13 1174
12. Bates F S and Fredrickson G H 1997 Phys. Today 52 32
13. Park M, Harrison C, Chaikin P M, Register R A and Adamson D H 1997 Science 276 1401
14. Urbas A M, Maldovan M, DeRege P and Thomas E L 2002 Adv. Mater. 14 1850
15. Black C T, Guarini K W, Milkove K R, Baker S M, Russell T P and Tuominen M T 2001 Appl. Phys. Lett. 79 409
16. Kim S O, Solak H H, Stoykovich M P, Ferrier N J, de Pablo J J and Nealey P F 2003 Nature 424 411
17. Cheng J Y, Ross C A, Thomas E L, Smith H I and Vancso G J 2003 Adv. Mater. 15 1599
18. Liu K, Baker S M, Tuominen M, Russell T P and Schuller I K 2001 Phys. Rev. B 63 060403(R)
19. Park M, Chaikin P M, Register R A and Adamson D H 2001 Appl. Phys. Lett. 79 257
20. Shin K, Leach K A, Goldbach J T, Kim D H, Jho J Y, Tuominen M, Hawker C J and Russell T P 2002 Nano Lett. 2 933
21. Hawker C J, Elce E, Dao J L, Volksen W and Russell T P 1996 Macromolecules 29 2686
22. Edwards E W, Montague M F, Solak H H, Hawker C J and Nealey P F 2004 Adv. Mater. 16 1315
23. Segalman R A, Ykoyama H and Kramer E J 2001 Adv. Mater. 13 1152
24. Rasmussen K Ü 2004 J. Polym. Sci. B 42 3695
25. Black C T and Bezencenet O 2004 IEEE Trans. Nanotechnol. 3 412