Master replication into thermosetting polymers for nanoimprinting

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3582-3585

  Schulz, H ^a   Lyebyedyev, D ^a   Scheer, H C ^a   Pfeiffer, K ^b   Bleidiessel, G ^b   Grutzner G ^b   Ahopelto, J ^c  

^a UNIVERSITY OF WUPPERTAL   (Germany)

^b MICRO RESIST TECHNOLOGY GMBH   (Germany)

^c VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; POLYMERS; POLYMETHYL METHACRYLATES; STAMPING; THERMOANALYSIS; THERMOSETS;

MASTER REPLICATION; NANOIMPRINT LITHOGRAPHY (NIL);

NANOTECHNOLOGY;

EID: 0034315092     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1319821     Document Type: Article

References (8)

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8. D. Lyebyedyev, H. Schulz, H.-C. Scheer, and K. Pfeiffer, E-MRS 2000, Strasbourg (to be presented).