SCOPUS 정보 검색 플랫폼

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2, Issue , 2003, Pages 793-796

Nanorheology of squeezed polymer films

(4) O'Connell, B a Cross, G L W a Pethica, J B a Oliver, W b

a TRINITY COLLEGE DUBLIN (Ireland)

b MTS Nano Instruments Innovation Center (United States)

Author keywords

Embossing; Milling; Polymer films; Printing; Residual stresses; Shape; Silicon; Substrates; Temperature; Tungsten

Indexed keywords

GLASS TRANSITION; MILLING (MACHINING); NANOIMPRINT LITHOGRAPHY; NANOTECHNOLOGY; POLYMERS; PRINTING; RESIDUAL STRESSES; SEMICONDUCTING FILMS; SILICON; STRESS RELAXATION; SUBSTRATES; TEMPERATURE; TUNGSTEN;

EMBOSSING; MECHANICAL CHARACTERISTICS; QUASI TWO-DIMENSIONAL FLOW; SHAPE; SPHERICAL INDENTERS; SUBSTRATE DEFORMATION; THIN POLYMER FILMS; TRANSITION REGIONS;

POLYMER FILMS;

EID: 32044458727 PISSN: 19449399 EISSN: 19449380 Source Type: Conference Proceeding
DOI: 10.1109/NANO.2003.1231033 Document Type: Conference Paper

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.