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Volumn 48, Issue 6 PART 2, 2009, Pages
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Fabrication and characteristics of micro-electro-mechanical-system-based tilt sensor
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Author keywords
[No Author keywords available]
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Indexed keywords
FABRICATION SEQUENCE;
MEASUREMENT RANGE;
METAL ELECTRODES;
MICRO-CHAMBERS;
MICROELECTROMECHANICAL SYSTEMS;
MICROHEATER;
OUTPUT CHARACTERISTICS;
TEMPERATURE PROFILES;
TILT SENSOR;
TWO-AXIS;
ELECTROLYTES;
FABRICATION;
SURFACE TENSION;
TEMPERATURE CONTROL;
TEMPERATURE SENSORS;
HEATING EQUIPMENT;
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EID: 70249131842
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.48.06FG05 Document Type: Article |
Times cited : (8)
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References (5)
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