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Volumn 48, Issue 6 PART 2, 2009, Pages

Fabrication and characteristics of micro-electro-mechanical-system-based tilt sensor

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION SEQUENCE; MEASUREMENT RANGE; METAL ELECTRODES; MICRO-CHAMBERS; MICROELECTROMECHANICAL SYSTEMS; MICROHEATER; OUTPUT CHARACTERISTICS; TEMPERATURE PROFILES; TILT SENSOR; TWO-AXIS;

EID: 70249131842     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.06FG05     Document Type: Article
Times cited : (8)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.