Improved pattern transfer in soft lithography using composite stamps

Langmuir

Volumn 18, Issue 13, 2002, Pages 5314-5320

  Odom, Teri W ^a   Love, J Christopher ^a   Wolfe, Daniel B ^a   Paul, Kateri E ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PHASE-SHIFTING LITHOGRAPHY;

COMPOSITE MATERIALS; PHASE SHIFT; PRINTING; STAMPING;

LITHOGRAPHY;

COMPOSITES; LITHOGRAPHY; PHASE TRANSITION; PRINTING; STAMPING;

EID: 0037173312     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la020169l     Document Type: Article

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