Mold-assisted nanolithography: A process for reliable pattern replication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4124-4128

  Haisma, Jan ^a   Verheijen, Martin ^a   Van Den Heuvel, Kees ^a   Van Den Berg, Jan ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5344268855     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588604     Document Type: Article

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