Fluorinated organic-inorganic hybrid mold as a new stamp for nanoimprint and soft lithography

Langmuir

Volumn 21, Issue 21, 2005, Pages 9390-9392

  Choi, Dae Geun ^a   Jeong, Jun Ho ^a   Sim, Young Suk ^a   Lee, Eung Sug ^a   Kim, Woo Soo ^b   Bae, Byeong Soo ^b  

^a Korea Institute of Machine and Materials   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORINE; HYDROLYSIS; LITHOGRAPHY; NANOTECHNOLOGY; SOL-GELS; SOLVENTS;

FLUORINATION; NANOIMPRINTING; NANOPATTERNING; SOL-GEL PROCESS;

MOLDS;

EID: 27144465249     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la0513205     Document Type: Review

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