Nanochannel fabrication for chemical sensors

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2887-2891

  Stern, Margaret B ^a   Geis, Michael W ^a   Curtin, Jane E ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001223244     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589750     Document Type: Article

References (6)

1. Capillary Electrophoresis (Theory & Practice), edited by P. D. Grossman and J. C. Colburn (Academic, San Diego, CA, 1992).
2. S. A. Gajar and M. W. Geis, J. Electrochem. Soc. 139, 2833 (1992).
3. J. Wiza, Nucl. Instrum. Methods 162, 587 (1979).
4. U. Grüning, V. Lehmann, S. Ottow, and K. Busch, Appl. Phys. Lett. 68, 747 (1995).
5. D. J. Harrison, K. Huri, K. Seiler, Z. Fan, C. S. Effenhauser, and A. Manz, Science 261, 895 (1993).
6. D. L. Harame, L. J. Bousse, J. D. Shott, and J. D. Meindl, IEEE Trans. Electron Devices ED-34, 1700 (1987).