Bilayer metal wire-grid polarizer fabricated by roll-to-roll nanoimprint lithography on flexible plastic substrate

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2388-2391

  Ahn, Se Hyun ^a   Kim, Jin Sung ^a,b   Guo, L Jay ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b LG Electronics Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

POLARIZATION EFFICIENCY; WIRE-GRID POLARIZERS;

FABRICATION; PLASTICS;

NANOIMPRINT LITHOGRAPHY;

ASSEMBLY; LITHOGRAPHY; PLASTICS;

EID: 37149008033     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2798747     Document Type: Article

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